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National Institute for R&D in Microtechnologies, also called IMT - Bucharest, (www.imt.ro), is a unit coordinated by the National Authority for Scientific Research (Ministry of Education, Research, Youth and Sports, Romania).

IMT - Bucharest mission is related to research and development in micro and nanotechnologies. IMT benefits from a rich experience in coordinating national networks, research and education projects, international cooperation (participation in 15 projects in FP6, 6 projects in FP 7). IMT - Bucharest is integrating research, education and technology transfer (innovation).. The research laboratories of IMT - Bucharest are involved in joint research with international and national partners, including SMEs, based on a multidisciplinary approach, promoting the convergence of micro-nano-bio-info technologies. IMT - Bucharest is involved in the development of several different types of microsensors and smart systems based on micro- and nanosystem technologies, which are related to new emerging technologies, as well as innovation in traditional industrial sectors.

Clean room facilities, class 1,000 (200 sqm). The present clean room (class 100 to class 1000) contains a mask shop with a DWL 66 (1 mm resolution), RIE, vacuum deposition system (E-Beam and sputtering), double-face alignment, deep pen nanolithography, etc. A new clean room (to be operational soon) will contain LPCVD, PECVD, APCVD, RTP equipments, etc.). Characterization area, class 100,000 (220 sqm): The characterization area (class 100,000) is equipped with SEM/EBL, nanoengineering workstation (Raith e_Line), FEG-SEM, SPM (AFM, STM etc.), nanoindenter, X-ray difractometer, Raman Spectrometer, SNOM, WLI, electrochemical impedance spectrometer, fluorescence, phosphorescence and lifetime spectrometer, nanoplotter and nanoscanner for microarrays, etc.

The main competences of IMT in micro-nanosystems and nanobiotechnology are detailed below:

• MEMS based microsensors and actuators for bio-medical, environmental applications and robotics: pressure sensors, accelerometers, microgrippers;
• RF-MEMS devices and circuits: design, modelling and manufacturing of dielectric membrane supported inductors, capacitors, filters and antennae based on silicon and GaAs micromachining; micromachined millimetre and sub millimetre wave receiver modules, SAW interdigitated traducers;
• Photonic devices and MOEMS (waveguides, optical couplers, microring filters and resonators; grating-based microstructures, tunable interferometers based on movable micromirrors, optical sensors), photonic circuits for optical interconnections;
• CNT based micro-nanostructures for sensing and interconnections;
• Microfluidic devices;
• Biochips for biological materials investigation and detection (proteins, DNA, enzymes) on various substrates (silicon, glass, polymers), microarrays, biosensors;
• Silicon nanoelectrode arrays, porous silicon layers (El, PL and bio-active properties); field emission nanostructures;
• Magnetic nanostructures;